NITRID-, CARBID- UND BORID-ELEKTRODEN MIT HOHER SPEZIFISCHER OBERFLÄCHE UND DEREN HERSTELLUNGSVERFAHREN

摘要

High surface area electrodes for use in electrical and electrochemical energy storage and conversion devices comprise conductive transition metal nitrides, carbides, borides or combinations thereof where the metal is molybdenum or tungsten. Disclosed is a method of manufacturing such electrodes by forming or depositing a layer of metal oxide, then exposing the metal oxide layer at elevated temperature to a source of nitrogen, carbon or boron in a chemically reducing environment to form the desired metal nitride, carbide or boride film. Also disclosed is an ultracapacitor comprised of the new high surface area electrodes having a specific capacitance of 100 mF/cm2 and an energy density of 100 mJ/cm3 with improved conductivity and chemical stability when compared to currently available electrodes.