发明名称 SEED CRYSTAL HOLDING JIG AND PROCESS FOR PRODUCING SINGLE CRYSTAL
摘要 Seed crystal holding jig (11) capable of, at the time of drawing up a single crystal in accordance with the Cyochralski method, holding a seed crystal by bringing tapered end face (15) of insert fit member (14) into pressed contact with tapered hold face (18) of seed crystal (5), the taper of the end face (15) in reverse relationship to that of the hold face (18), characterized in that the holding jig (11) is furnished with two or more insert fit members, these insert fit members having a height equal to that of main body (12) of the holding jig and provided at equal intervals round center axis (19) of the holding jig. Preferably, the insert fit members are constituted of a carbon fiber reinforced carbon composite material or an isotropic sintered carbon, while the main body of holding jig comprises eiher a carbon fiber reinforced carbon composite material or a reinforced isotropic sintered carbon or molybdenum. Thus, there are provided a seed crystal holding jig and a process for producing a single crystal, which enable securely drawing up a single crystal of high purity without breakage of seed crystal or holding jig even when a single crystal of large weight, such as 170 kg or more, is grown.
申请公布号 WO03106742(A1) 申请公布日期 2003.12.24
申请号 WO2003JP07319 申请日期 2003.06.10
申请人 SHIN-ETSU HANDOTAI CO.,LTD.;OKUNI, SADAYUKI;SONOKAWA, SUSUMU;MIZUISHI, KOJI;OHTA, TOMOHIKO 发明人 OKUNI, SADAYUKI;SONOKAWA, SUSUMU;MIZUISHI, KOJI;OHTA, TOMOHIKO
分类号 C30B15/00;C30B15/32;C30B29/06;(IPC1-7):C30B15/32 主分类号 C30B15/00
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