发明名称 Thin-film magnetic element capable of effectively orienting magnetization direction of magnetic layer and manufacturing method thereof
摘要 A thin-film magnetic element comprises a substrate and a magnetoresistive multilayer film provided on the substrate. The multilayer film includes at least one magnetic layer. Bias underlayers formed of a nonmagnetic material are comprised in the thin-film magnetic element, having sidewall portions formed along side surfaces of the multilayer film and base portions formed on the surface of the substrate in the track width direction. The thickness of the sidewall portions is larger than that of the base portions. Hard magnetic layers for orienting the magnetization direction of at least one magnetic layer are deposited on the bias underlayers at sides of the multilayer film.
申请公布号 US6667493(B2) 申请公布日期 2003.12.23
申请号 US20010992944 申请日期 2001.11.06
申请人 ALPS ELECTRIC CO., LTD. 发明人 OOSHIMA MASAHIRO
分类号 C23C14/14;G01R33/09;G11B5/39;G11C11/15;H01F10/08;H01F10/32;H01F41/18;H01L43/08;H01L43/12;(IPC1-7):H01L31/036 主分类号 C23C14/14
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