发明名称 Non-volatile semiconductor memory device and method of manufacturing the same
摘要 A non-volatile semiconductor memory device comprising a device isolation insulation layer, formed on a semiconductor substrate, for defining a device region, a floating gate formed on the device region and having a pair of first side faces opposed to a side face of the device isolation insulation layer, which the side face is located on the device region side, a control gate formed above the floating gate, and a booster electrode having faces opposed to a pair of second surfaces which are substantially perpendicular to the pair of first side faces. A distance between the pair of first side faces of the floating gate is less than a width of the device region defined by the device isolation insulation layer.
申请公布号 US6667211(B2) 申请公布日期 2003.12.23
申请号 US20020292265 申请日期 2002.11.12
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 WATANABE TOSHIHARU
分类号 H01L21/8247;G11C16/04;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):H01L21/336 主分类号 H01L21/8247
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