摘要 |
A non-volatile semiconductor memory device comprising a device isolation insulation layer, formed on a semiconductor substrate, for defining a device region, a floating gate formed on the device region and having a pair of first side faces opposed to a side face of the device isolation insulation layer, which the side face is located on the device region side, a control gate formed above the floating gate, and a booster electrode having faces opposed to a pair of second surfaces which are substantially perpendicular to the pair of first side faces. A distance between the pair of first side faces of the floating gate is less than a width of the device region defined by the device isolation insulation layer.
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