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发明名称
FORMATION OF THIN FILM RESISTORS
摘要
申请公布号
IL156217(D0)
申请公布日期
2003.12.23
申请号
IL20030156217
申请日期
2003.05.29
申请人
MORTON INTERNATIONAL, INC.;MICROCOATING TECHNOLOGIES INC.
发明人
分类号
C23C;C23C16/40;(IPC1-7):C23C
主分类号
C23C
代理机构
代理人
主权项
地址
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