| 摘要 |
PROBLEM TO BE SOLVED: To make effective special utilization by a method, wherein a processing structure is constituted by laminating processing blocks for a single process in the vertical direction for processing units for a series of processings to sheet-like workpieces, such as semiconductor wafer or glass substrate, etc., and a processor constituted of these continuouslly connected processing units. SOLUTION: A processor structure 1 is constituted of a plurality of processing units 2 which are connected continuouslly in the lateral direction, while carrier parts 3 are arranged on respective processing units 2 so that sheet-like workpieces are delivered between adjacent processing units 2 by carriers such as shuttles(SH) provided inside these carrier parts 3. Furthermore, the processing units 2 are composed of processing blocks 4 and transfer robots(R) arranged between these processing blocks 4, 4 and in addition, the respective processing units 2 are made mutually independent for evabling of increase or decrease with respect to and from the processing structure 1. |
