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发明名称
摘要
申请公布号
JP3482401(B2)
申请公布日期
2003.12.22
申请号
JP20010134076
申请日期
2001.05.01
申请人
发明人
分类号
F04B37/16;H01J9/385;(IPC1-7):H01J9/385
主分类号
F04B37/16
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