| 摘要 |
FIELD: manufacture of active solid substrates and piezoelectric resonators. SUBSTANCE: device intended for control over orientation of shear plane of monocrystalline wafers while manufacturing active solid substrates and piezoelectric resonators has X-ray tube, focusing X-ray lens, holder of tested monocrystalline wafer, position-sensitive detector and means to process and to analyze output signals of detector. The latter is mounted for recording of radiation diffracted on tested monocrystalline wafer. Lens is set between output window of X-ray tube and holder so that its output focus is located on surface of shear of tested monocrystalline wafer or under this surface. EFFECT: raised precision. 1 cl, 6 dwg
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