A METHOD FOR PHOTOLITHOGRAPHY USING MULTIPLE ILLUMINATIONS AND A SINGLE FINE FEATURE MASK,申请号AU20030240931-传众专利搜索

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发明名称	A METHOD FOR PHOTOLITHOGRAPHY USING MULTIPLE ILLUMINATIONS AND A SINGLE FINE FEATURE MASK
摘要
申请公布号	AU2003240931(A1)	申请公布日期	2003.12.19
申请号	AU20030240931	申请日期	2003.05.29
申请人	MASSACHUSETTS INSTITUTE OF TECHNOLOGY	发明人	MICHAEL FRITZE;BRIAN, M. TYRELL
分类号	G03B27/48;(IPC1-7):G03F7/20	主分类号	G03B27/48
代理机构		代理人
主权项
地址

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