| 发明名称 |
Probe, near-field light generation apparatus including probe, exposure apparatus, and exposing method using probe |
| 摘要 |
A probe which generates near-field light from an aperture at the tip is provided. The tip is covered with a lightproof member, at least the interior of the lightproof member is in the shape of a cone having a plane-shaped top, and the aperture is provided in the top plane.
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| 申请公布号 |
US2003230709(A1) |
申请公布日期 |
2003.12.18 |
| 申请号 |
US20030440237 |
申请日期 |
2003.05.19 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
YAMADA TOMOHIRO;MIZUTANI NATSUHIKO |
| 分类号 |
G01Q60/22;G01Q70/10;G01Q80/00;G11B7/135;G11B7/22;H01J3/14;(IPC1-7):H01J3/14 |
主分类号 |
G01Q60/22 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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