发明名称 DEVICE AND METHOD FOR POSITIONING A PLATE-TYPE SUBSTRATE
摘要 The invention relates to a device and a method for positioning a substrate (101) on a transport section (100) that comprises a conveyer belt (302). According to the invention, the position of the transported substrate (101) is determined by means of a photoelectric barrier, which detects the front edge of the substrate (101), viewed from the direction of transport (102). The detection area (105) of the photoelectric barrier extends to just under the bearing level (701) of the substrate (101) on the conveyer belt (302). This allows the front edge of the substrate to be detected even if the latter lies below the bearing level (701), for example as a result of flexure. The conveyer belt (302) is guided in a loop around the detection area (105) of the photoelectric barrier, in such a way that said detection area (105) can extend transversally over the entire transport section (100). The invention is characterised in that it also uses a sensor element (106), which is mounted on the transport section (100) upstream of the photoelectric barrier and is likewise used to detect the front edge of the substrate (101) to be positioned. This permits a particularly gentle deceleration of the substrate (101) that is displaced along the transport section (100).
申请公布号 WO03088321(A3) 申请公布日期 2003.12.18
申请号 WO2003DE01063 申请日期 2003.04.01
申请人 SIEMENS AKTIENGESELLSCHAFT;EISINGER, DIRK;ZOLLER, MARC 发明人 EISINGER, DIRK;ZOLLER, MARC
分类号 H01L21/00;H01L21/677;H01L21/68 主分类号 H01L21/00
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