发明名称 |
UV COMPATIBLE PROGRAMMABLE SPATIAL FILTER |
摘要 |
Disclosed are mechanisms for selectively filtering spatial portions of light emanating from a sample under inspection within an optical system. In one embodiment, a programmable spatial filter (PSF) is constructed from materials that are compatible with light in a portion of the UV wavelength range. In a specific implementation, the PSF is constructed from a UV compatible material, such as a polymer stabilized liquid crystal material. In a further aspect, the PSF also includes a pair of plates that are formed from a UV grade glass. The PSF may also include a relatively thin first and second ITO layer that results in a sheet resistance between about 100 and about 300 W per square. In a specific embodiment, the PSF provides selective filtering in two directions. In other words, the PSF provides two dimensional filtering. |
申请公布号 |
WO03083560(A3) |
申请公布日期 |
2003.12.18 |
申请号 |
WO2003US09537 |
申请日期 |
2003.03.28 |
申请人 |
KLA-TENCOR TECHNOLOGIES CORPORATION |
发明人 |
WILK, DIETER, E.;TANG, ANLUN;VELLA, ERIC, N.;RUNYON, REX;SULLIVAN, JAMIE, M.;JOHNSON, RALPH, T. |
分类号 |
G01B11/30;G01N21/956;G02B27/46;G02F1/13 |
主分类号 |
G01B11/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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