| 摘要 |
<p>A small-sized vacuum chamber requiring no load lock chamber. A voice coil-type linear motor has a closed magnetic circuit having the shape of a square with a line in the middle, where the circuit comprises a pair of outer yokes (11), an inner yoke (12), and side yokes (13). Armatures are fixed inside the outer yokes (11) and permanent magnets are provided movably. A coil (18a) is wound on a bobbin (17) and a case (23) is formed outside the bobbin. A coil portion is made watertight and a water supply port and water discharge port are provided in the bobbin or the case, and cooling fluid is run between the coil and the case so that the coil is cooled directly.</p> |
