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发明名称
Verfahren zur Herstellung einer Hohlkehle an einem Halbleiterbauelement
摘要
申请公布号
CH489116(A)
申请公布日期
1970.04.15
申请号
CH19690007331
申请日期
1969.05.14
申请人
AKTIENGESELLSCHAFT BROWN, BOVERI & CIE.
发明人
SATTLER,GUENTER;WEIMANN,KLAUS,DIPL.-ING.
分类号
H01L29/74;B24B9/06;B24B19/02;B28D5/04;H01L21/304;H01L29/861;(IPC1-7):H01L7/00
主分类号
H01L29/74
代理机构
代理人
主权项
地址
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