PREPARATION METHOD OF CONDUCTIVE RESIN POWDER

摘要

PURPOSE: A method for preparing a conductive resin powder, a conductive resin powder prepared by the method and an anisotropic conductive film prepared by using the resin powder are provided, to improve the uniformity and thickness precision of metal coating on resin powder. CONSTITUTION: The method comprises the steps of inputting resin powder into a vacuum chamber; and sputtering the resin powder by generating a metal element from a metal target by a low temperature plasma with flowing the resin powder to form a metal coating on the resin powder and continuously flowing an inert gas such as argon or nitrogen in the vacuum chamber whose pressure is maintained to be 10¬-7 to 10¬-1 Torr. Preferably the deposition velocity of the metal coating is 1 nm/min or more, and the thickness of the metal coating is about 10-100 nm.