| 摘要 |
PURPOSE: An array substrate for low temperature poly silicon liquid crystal display and a method for manufacturing the same are provided to reduce processing time and manufacturing costs by reducing the number of masks. CONSTITUTION: Poly silicon is formed on a substrate, and an island type active layer(112) is formed on the poly silicon by using a first mask. Source and drain areas are formed on the active layer. A gate electrode(118) is formed on the active layer by using a second mask. An interlayer insulating film(122) is formed on the gate electrode. A pixel electrode(128) is formed on the interlayer insulating film by using a third mask. An insulating layer is formed on the pixel electrode. First and second contact holes are formed on the interlayer insulating film and the insulating layer by using a fourth mask. A metal layer and a photoresist are deposited on the insulating layer. In parts of the metal contacting with the source and drain areas, boundary parts are partially patterned and pixel areas are completely exposed. Metal parts of the partially patterned areas are removed to form source and drain electrodes(134a,134b). |
