NEGATIVE ELECTRODE FOR LITHIUM SECONDARY THIN FILM BATTERY AND PREPARATION METHOD THEREOF

摘要

PURPOSE: A negative electrode for a lithium secondary thin film battery and its preparation method are provided, to improve the stability by using Si instead of Li and to enhance the charge/discharge performance by suppressing the volume change due to the reaction with Li. CONSTITUTION: The negative electrode comprises a nanocompound matrix of Si and a metal which does not react with Li and has a strong affinity with Si; and a nano-sized silicon dispersed in the matrix. Preferably the metal which does not react with Li is selected from the group consisting of Ni, Co, Fe, Cr, Fe, Hf, Mn, Mo, Nb, Ti, V, Zr, Ta, W and Re. The method comprises the steps of forming a thin film on a substrate with Si and the metal which does not react with Li; and impressing energy the substrate. Preferably the energy impressing is carried out by impressing direct bias, heating, irradiating an ion beam or treating plasma.