METHOD FOR REMOVING FLUORINE POLYMER OF ALUMINUM PAD SURFACE

摘要

PURPOSE: A method for removing fluorine polymer of aluminum pad surface is provided to be capable of preventing the oxidation of the aluminum pad surface by forming an oxide layer on the surface of the aluminum pad. CONSTITUTION: A protecting layer is selectively formed on the surface of an aluminum pad(10), wherein the aluminum pad is used for connecting a device with an outer terminal. A wet process is carried out at the resultant structure by using a mixed solution of HOCH2CH2NH2 and (CH3)2SO for removing a fluorine polymer layer(12) existing on the surface of the aluminum pad, while an oxide layer is simultaneously formed on the surface of the aluminum pad. Preferably, the protecting layer is formed by selectively using SiN and PBO(Poly BenzOxasole).