METHOD AND APPARATUS FOR DETECTING VACUUM LEAKAGE OF LIFT BELLOWS

摘要

PURPOSE: A method for detecting a vacuum leakage of a lift bellows is provided to detect damaged lift bellows by sealing lift holes formed in a support member while using a plate having a similar type to a chuck on which a semiconductor substrate is placed and a plurality of caps and by measuring the inner pressure of a chamber while sequentially removing the caps. CONSTITUTION: The chuck on which the substrate is placed is included inside the chamber for processing the substrate. The support member supports the chuck. Lift holes in which lift pins for loading/unloading the substrate are installed are sealed, penetrating the chuck and the support member(S100). The inside of the chamber is made vacuum(S200). The sealed lift holes sequentially gets open and the inner pressure of the chamber is measured, so that the sealing state of the lift bellows respectively connected to the lift holes formed in the support member is checked(S300).