| 摘要 |
PURPOSE: A wafer transfer apparatus is provided to be capable of simplifying a wafer pickup or place operation by removing the open/close operation of a gripper. CONSTITUTION: A wafer transfer apparatus(200) is provided with the upper and lower fixing gripper(41) for stably loading a wafer, a driving part(60) for moving the grippers to and fro in order to transfer the wafer, and a linear operation guide part(20) for guiding the grippers. Preferably, a sensor part is installed at the inner surface of the gripper for checking whether a wafer exists between the upper and lower fixing gripper. Preferably, a photo sensor part is used as the sensor part. Preferably, the photo sensor part includes a light emitting sensor and a light receiving sensor. At this time, the light emitting and receiving sensor are installed at the upper and lower portion of the wafer, respectively.
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