发明名称 MICROELECTRONIC FABRICATION HAVING FABRICATED THEREIN SPATIALLY OVERLAPPING CAPACITOR STRUCTURES
摘要 Within a method for fabricating a microelectronic fabrication, and the microelectronic fabrication fabricated employing the method, there is formed over a substrate a first capacitor structure comprising a pair of first capacitor plate layers and a second capacitor structure comprising a pair of second capacitor plate layers. Within the method and the resulting microelectronic fabrication, the pair of first capacitor plate layers within the first capacitor structure is electrically isolated, at least in part vertically separated and at least in part horizontally overlapped with respect to the pair of second capacitor plate layers within the second capacitor structure. The method provides the resulting microelectronic fabrication with enhanced and performance.
申请公布号 US2003232482(A1) 申请公布日期 2003.12.18
申请号 US20020172137 申请日期 2002.06.14
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. 发明人 YU CHI-HSING
分类号 H01L21/02;H01L27/02;H01L27/108;(IPC1-7):H01L21/824 主分类号 H01L21/02
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