| 摘要 |
A container conveying system for conveying containers (8) receiving substrates such as wafers in a clean room, comprising a conveyor (7) disposed substantially parallel with a plurality of processing devices (5-1, 5-2, 5-3...) for conveying containers (8), and a transfer device (9) capable of freely moving in a ceiling space in the upper region of the clean room, wherein the plurality of processing devices (5-1, 5-2, 5-3...) are disposed on at least one side of an aisle and respectively provided on their sides facing the aisle with interface devices (6-1, 6-2, 6-3...), the interface devices (6-1, 6-2, 6-3...) being adapted to temporally receive the containers (8) and move the substrates from within the containers (8) into the processing devices(5-1, 5-2, 5-3...) in an enclosed atmosphere and vice versa, and the transfer device (9) being adapted to transfer the containers (8) between the transfer device (7) and the plurality of processing devices (5-1, 5-2, 5-3...) or between the plurality of processing devices (5-1, 5-2, 5-3...). According to this container conveying system, it is possible to provide a container conveying system that is further improved in container conveyance capacity, conveyance process capacity, footprint, container stock function, sort function, etc.
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