WAFER TRANSFER APPARATUS OF SEMICONDUCTOR MANUFACTURING PHOTO EQUIPMENT

摘要

PURPOSE: A wafer transfer apparatus of a semiconductor manufacturing photo equipment is provided to be capable of preventing the generation of wafer photo process failure due to the error generated at a transfer robot by using a sub-transfer robot. CONSTITUTION: A wafer transfer apparatus of a semiconductor manufacturing photo equipment is provided with a transfer robot(3) for transferring a wafer so as to carry out predetermined processes at a bake after exposure module(17) and cooling plate module(19), a sub-transfer robot(20) for transferring the wafer from the bake after exposure module to the cooling plate module when error is generated at the transfer robot, and a controller(22) for controlling the whole operation for carrying out a photo process and the sub-transfer robot.