HEATER MODULE FOR SEMICONDUCTOR PRODUCTION SYSTEM

摘要

A heater module and a semiconductor production system comprising it in which cooling rate of the heater can be increased greatly after heating without increasing the size or the cost of the semiconductor production system. The heater module comprises a heater section (1a) for controlling heating while mounting a wafer on the surface, and a block section (3a) disposed to move relatively to the heater section (1a) and vary the total heat capacity of the block section (3a) and the heater section (1a) by abutting on the rear side of the heater section (1a) or separating therefrom. Cooling rate of the heater can be set at 10˚C/min or above by setting the heat capacity at the block section (1b) not lower than 20% of the total heat capacity of the heater section (1a) and the block section (1b).