发明名称 Methods of fabbricating a stack-gate non-volatile memory device and its contactless memory arrays
摘要 A stack-gate non-volatile memory device with a tapered floating-gate structure is disclosed by the present invention, in which the tapered floating-gate structure offers a longer effective channel length to alleviate the punch-through effect and a larger surface area for erasing or programming between the tapered floating-gate structure and the integrated common-source/drain conductive structure. The stack-gate non-volatile memory devices of the present invention are implemented into three contactless array architectures: a contactless NOR-type array, a contacless NAND-type array, and a contactless parallel common-source/drain conductive bit-lines array. The features and advantages of the contactless memory arrays are a smaller cell size of 4F<2>, a smaller common-source/drain bus-line resistance and capacitance, a higher erasing speed, and a smaller bit/word-line resistance and capacitance, as compared to the prior arts.
申请公布号 US2003232472(A1) 申请公布日期 2003.12.18
申请号 US20020170453 申请日期 2002.06.14
申请人 SILICON BASED TECHNOLOGY CORP. 发明人 WU CHING-YUAN
分类号 H01L21/8247;H01L27/115;(IPC1-7):H01L21/336 主分类号 H01L21/8247
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