Etching system and etching method

摘要

An etching system for subjecting a single film to be etched to etching comprised of a plurality of etching steps applying respective different recipes. The etching system comprises a recipe generating means which fixes the recipe to be applied to the final etching step affecting an underlying film making contact with the film to be etched, of the etching steps, to a preset recipe and which generates a recipe to be applied to the residual etching step on the basis of the results of processing, and etching processing is conducted according to the recipes generated by the recipe generating means.