Electromagnetic X-Y stage driver for nano data storage system and method for fabricating coils of the same

摘要

An electromagnetic x-y stage driver for a nano data storage system and a method for fabricating the coils of the same are provided. In the electromagnetic x-y stage driver, a cantilever tip array fixedly provided a medium for recording data to write data to or read data from each cell of the medium. Four coils are formed to be integrated with the medium in front of, behind, to the left of and to the right of the medium to move the medium. Four supporting beam are installed to an x-y stage body onto which a medium structure composed of the medium and the four coils is loaded such that the four supporting beam are connected to the four corners of the medium structure to support the medium structure. Four driving beams connect the upper portions of the supporting beam to the four corners of the medium structure to allow the medium structure to move in an x or y direction. Stiffeners are disposed at the four sides between the supporting beam to prevent the medium structure from rotating. Four pairs of permanent magnets are disposed above and below the four coils so that the four pairs of the permanent magnets correspond to the four coils, respectively. Four yokes are provided so that each of them joins the edges of the upper and lower permanent magnets of each of the four pairs of the permanent magnets to allow the magnetic flux of the permanent magnets to form a closed loop.