Dynamic shaping of laser beams

摘要

In laser light beam (1) shaping, a reflective Spatial Light Modulator (3) is used as a kinoform. The configuration of the SLM can be modified, thus the hologram or phase hologram can be altered for different etching jobs. The SLM is typically a Liquid Crystal on Silicon microdisplay (LCOS), which reflects, rather than transmitting, the incident laser light. The modulated light is then used to modify a surface (4).