ZNS-SIO 2 SPUTTERING TARGET AND OPTICAL RECORDING MEDIUM HAVING ZNS-SIO 2 PHASE-CHANGE TYPE OPTICAL DISC PROTECTIVE FILM FORMED THROUGH USE OF THAT TARGET

摘要

The present invention relates to a ZnS-SiO2 sputtering target having a relative density of 90% or more characterized in being sintered with powder wherein 1 to 50mol% of SiO2 glass powder containing, as an additive, a total of 0.01 to 20wt% of one or more types selected from a metal element, boron, phosphorus, arsenic or the oxides thereof, and the remnant ZnS powder are evenly dispersed and mixed. By enabling the stable manufacture of a target at low cost and in which the SiO2 crystal grain is minute and of a high density of 90% or more, obtained is a sputtering target for forming an optical disc protective film capable of further improving the evenness of deposition and increasing the productivity rate, and an optical recording medium having formed thereon a ZnS-SiO2 phase change optical disc protective film upon employing the ZnS-SiO2 sputtering target. <IMAGE>