Lithographic apparatus and device manufacturing method

摘要

A linear seal 100 seals over a slot 112 formed in a wall 110 of a vacuum chamber VC of a lithographic projection apparatus. The linear seal 100 comprises an elongate sealing member 120 which is locally displaced from the slot 112 at a selectable position 125 such that conduits 140 may pass from outside of the vacuum chamber VC to the inside of the vacuum chamber VC at the local displacement of the elongate sealing member 120.