发明名称 Ferroelectric memory configuration and a method for producing the configuration
摘要 An integrated ferroelectric memory configuration and a method for producing the integrated ferroelectric memory configuration, in which memory cells are arranged using the stacking principle, and both capacitor electrodes, which are located one above the other, of each memory cell are directly electrically connected by means of contact plugs to corresponding source and drain regions of an associated selection transistor in the substrate. Contact plugs for the contact connection to the upper capacitor electrodes are produced from above the configuration.
申请公布号 US6664158(B2) 申请公布日期 2003.12.16
申请号 US20010034931 申请日期 2001.11.21
申请人 INFINEON TECHNOLOGIES AG 发明人 DEHM CHRISTINE;HOENIGSCHMID HEINZ;ROEHR THOMAS
分类号 H01L21/8246;H01L27/115;(IPC1-7):H01L21/824 主分类号 H01L21/8246
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