| 摘要 |
1,153,787. Discharge apparatus. LIBBEYOWENS-FORD-GLASS CO. 30 Aug., 1966 [1 Sept., 1965], No. 38600/66. Heading H1D. Contaminents are removed from the surface of a substrate 15 by a reactive gas which is ionized and the ions accelerated by a confined electric field to strike the surface and remove impurities by bombardment and by chemical action. The known use of an inert gas is referred to. The substrate 15 is passed through vacuum seals 17, 18 of an enclosure 10 connected to a pump 16. Reactive gas enters the enclosure through apertures 44, 45 in tubular electrodes 47, 48 connected to a negative supply 40 and insulated by non-conductive annular spacers 57, 58 from gas supply pipes 55, 56. A positive static charge builds up on the surface of the substrate if the latter is non-conductive. If conductive, the substrate is earthed. The electrostatic field and ionized gas are confined by a chamber 22 formed by two closed-ended channels 23, 24, e.g. of aluminium. The reactive gas is preferably a reducing agent, e.g. hydrogen or a gaseous halide or a fluorocarbon. A plurality of electrodes may be employed on each side of the substrate 15 and may extend transversely thereto. The enclosure 10 may be modified, e.g. by providing a door, to permit material of other than strip shape to be treated. |
