发明名称 Semiconductor device includes gate insulating film having a high dielectric constant
摘要 A semiconductor device comprising a semiconductor substrate and a MOSFET provided on the semiconductor substrate, the MOSFET including a gate insulating film and a gate electrode provided on the gate insulating film, wherein the gate insulating film has a higher dielectric constant in a side contacting the semiconductor substrate than in a side contacting the gate electrode.
申请公布号 US6664577(B2) 申请公布日期 2003.12.16
申请号 US20020106345 申请日期 2002.03.27
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 TAKAYANAGI MARIKO
分类号 H01L29/78;C23C16/40;C23C16/455;H01L21/28;H01L21/316;H01L21/318;H01L21/336;H01L21/8234;H01L29/423;H01L29/51;H01L29/76;(IPC1-7):H01L29/76 主分类号 H01L29/78
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