发明名称 |
Method of cleaning fluorine-containing rubber molded article for semiconductor production apparatuses and cleaned molded article |
摘要 |
To provide a novel and effective cleaning method which can give a cleaned fluorine-containing rubber molded article for semiconductor production apparatuses.The method of cleaning the fluorine-containing rubber molded article for semiconductor production apparatuses, which comprises washing the fluorine-containing rubber molded article at least once with ultra pure water which has a metal content of not more than 1.0 ppm and does not contain fine particles of not less than 0.2 mum in an amount of more than 300 per 1 ml.
|
申请公布号 |
US6663722(B1) |
申请公布日期 |
2003.12.16 |
申请号 |
US20000646949 |
申请日期 |
2000.09.25 |
申请人 |
DAIKIN INDUSTRIES, LTD. |
发明人 |
HIGASHINO KATSUHIKO;NOGUCHI TSUYOSHI;KISHINE MITSURU;HASEGAWA MASANORI |
分类号 |
B08B3/04;(IPC1-7):B08B3/04 |
主分类号 |
B08B3/04 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|