发明名称 Linear motion apparatus and associated method
摘要 A guide apparatus comprising a plurality of guide linkages. Each one of the plurality of guide linkages comprises a pair of linkage members, each pair of the linkage members are rotatably connected about a guide pivot axis. The guide pivot axis of each guide linkage is arranged in a direction opposed to the direction of the guide pivot axis of the remainder of the guide linkages. In one aspect, each guide linkage is arranged between a robot platform or a cassette and a base such that extending each of the plurality of guide linkages acts to linearly displace the robot platform relative to the base while limiting tilting of the robot platform or the cassette. In another aspect a robot can extend its end effectors while limiting tilting of the end effectors.
申请公布号 US6662673(B1) 申请公布日期 2003.12.16
申请号 US20000684500 申请日期 2000.10.06
申请人 APPLIED MATERIALS, INC. 发明人 OLGADO DONALD J. K.
分类号 C25D5/00;C25D7/12;H01L21/00;H01L21/288;H05K3/24;(IPC1-7):B25J18/00;B21D39/03;C25B9/00 主分类号 C25D5/00
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