发明名称 Supporting system in exposure apparatus
摘要 A supporting system having a carrying member for carrying a workpiece thereon and a supporting mechanism for supporting the carrying member from a workpiece transfer position to a workpiece processing position, wherein, adjacent the transfer position, the weight of the carrying member and a force to be applied to the carrying member are substantially balanced, and wherein, adjacent to the workpiece processing position, the weight of the carrying member and a force to be applied to the carrying member are substantially balanced.
申请公布号 US6665053(B2) 申请公布日期 2003.12.16
申请号 US20010784054 申请日期 2001.02.16
申请人 CANON KABUSHIKI KAISHA 发明人 KORENAGA NOBUSHIGE
分类号 G12B5/00;G03B27/58;G03F7/20;H01L21/027;H01L21/68;H02N15/00;(IPC1-7):G03B27/58;G03B27/62;G03B27/42;B64C17/06;H02K41/00 主分类号 G12B5/00
代理机构 代理人
主权项
地址