发明名称 |
Manufacturing method of ceramic device using mixture with photosensitive resin |
摘要 |
A manufacturing method of ceramic device comprising the steps of forming by layer accumulation of a lower electrode, a piezoelectric/electrostrictive layer, and an upper electrode on a substrate using a mixture of photosensitive resin and metal or piezoelectric/electrostrictive ceramic; and patterning by light exposure at a single time, thereby, producing a ceramic device of high shape ratio can be produced and precision degree is very high so as to produce a ceramic device very precise in arrangement between layers or with infrastructure so that another effect may be made to systematically prevent the short between upper and lower electrodes.
|
申请公布号 |
US6662418(B1) |
申请公布日期 |
2003.12.16 |
申请号 |
US19990444128 |
申请日期 |
1999.11.19 |
申请人 |
SAMSUNG ELECTRO-MECHANICS CO., LTD. |
发明人 |
YUN SANG KYEONG;KIM DONG HOON;PARK SUNG JUNE |
分类号 |
B41J2/16;B41J2/045;B41J2/055;H01L41/24;H04R17/00;(IPC1-7):H04R17/00;H05L3/06 |
主分类号 |
B41J2/16 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|