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发明名称
摘要
申请公布号	JPS4517914(Y1)	申请公布日期	1970.07.22
申请号	JP19660101060U	申请日期	1966.11.01
申请人		发明人
分类号	(IPC1-7):G01K7/04;G01K1/14;H01L35/02	主分类号	(IPC1-7):G01K7/04
代理机构		代理人
主权项
地址

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