| 摘要 |
PURPOSE: A moving air cleaning room is provided to be capable of reducing the equipment investment cost for manufacturing a semiconductor device. CONSTITUTION: A moving air cleaning room is provided with a container box(10) having the first entrance door(12) installed at one side, an air shower room(20) installed near the first entrance door, a plurality of air cleaning apparatuses(30) located at the inner predetermined portions of the container box, and a constant temperature and moisture conserving apparatus(40) installed between the air cleaning apparatuses. At this time, a semiconductor manufacturing equipment(50) is stored at the inner portion of the container box. Preferably, the moving air cleaning room further includes the second entrance door installed at the other side of the container box and a connecting part(16) installed at each entrance door for airtightly connecting a plurality of container boxes.
|
