| 摘要 |
PURPOSE: A conveyer motion type semiconductor manufacturing apparatus is provided to be capable of easily controlling the tension of a driving belt for preventing load from being applied to a driving shaft. CONSTITUTION: A conveyer motion type semiconductor manufacturing apparatus is provided with a plurality of bar type substrate moving shafts(21) spaced apart from each other for loading a semiconductor substrate(100), at least one sub-support shaft(23) installed at the lower portion of the substrate moving shafts for supporting the semiconductor substrate, and a driving shaft(25) installed at the lower portion of the substrate moving shafts and the sub-support shaft. The conveyer motion type semiconductor manufacturing apparatus further includes a driving belt(29) for connecting the driving shaft with the substrate moving shafts and the sub-support shaft, a driving motor(26) connected with the driving shaft, and a tension control part(27) for controlling the tension of the driving belt.
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