SEMICONDUCTOR DEVICE INSPECTING APPARATUS CAPABLE OF MEASURING POGO BLOCK LEVELING

摘要

PURPOSE: A semiconductor device inspecting apparatus capable of measuring pogo block leveling is provided to be capable of preventing the generation of the level deformation of a pogo block due to errors. CONSTITUTION: A semiconductor device inspecting apparatus is provided with a probe card built-in equipment body part having an opening portion, a pogo block(21) for contacting the probe card, a test head(20), a plurality of first protrusions(21b) formed at the peripheral portion of the pogo block, and a rotating ring installed at the opening portion of the equipment body part. At this time, the second protrusions are formed at the inner portion of the rotating ring corresponding to each first protrusion. At the time, the thickness of the first protrusion is capable of being inspected by using a thickness measuring jig(50).