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发明名称
Charged particle beam column and method for directing a charged particle beam
摘要
申请公布号
AU2003241427(A8)
申请公布日期
2003.12.12
申请号
AU20030241427
申请日期
2003.05.12
申请人
APPLIED MATERIALS, INC.;APPLIED MATERIALS ISRAEL, LTD.
发明人
IGOR PETROV;ZVIKA ROSENBERG;IGOR KRYVITZ;JUERGEN FROSIEN;PAVEL ADAMEC;RALF DEGENHARDT
分类号
H01J37/04;H01J37/147;H01J37/153;H01J37/244;H01J37/28;(IPC1-7):H01J37/147
主分类号
H01J37/04
代理机构
代理人
主权项
地址
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