发明名称 A METHOD FOR MAKING A SEMICONDUCTOR DEVICE HAVING A HIGH-K GATE DIELECTRIC
摘要 A method for making a semiconductor device is described. That method comprises forming on a substrate a dielectric layer that has a dielectric constant that is greater than the dielectric constant of silicon dioxide. An insulating layer, which is compatible with the dielectric layer and a gate electrode to be formed on the insulating layer, is formed on the dielectric layer, and a gate electrode is then formed on the insulating layer.
申请公布号 WO03103032(A2) 申请公布日期 2003.12.11
申请号 WO2003US16307 申请日期 2003.05.22
申请人 INTEL CORPORATION 发明人 CHAU, ROBERT;ARGHAVANI, REZA
分类号 H01L21/28;H01L29/51 主分类号 H01L21/28
代理机构 代理人
主权项
地址