发明名称 |
Method of making silica-titania extreme ultraviolet elements |
摘要 |
Methods and apparatus for manufacturing titania-containing fused silica bodies are disclosed. The titania-containing fused silica bodies are subsequently processed to make extreme ultraviolet soft x-ray masks. The methods and apparatus involve providing powders external to a furnace cavity and depositing the powders in the furnace cavity to form a titania-containing fused silica body.
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申请公布号 |
US2003226377(A1) |
申请公布日期 |
2003.12.11 |
申请号 |
US20030378390 |
申请日期 |
2003.03.03 |
申请人 |
BARRETT W. TIM;BOWDEN BRADLEY F.;DAVIS CLAUDE L.;HRDINA KENNETH E.;ROBINSON MICHAEL MR.;WASILEWSKI MICHAEL H.;WIGHT JOHN F. |
发明人 |
BARRETT W. TIM;BOWDEN BRADLEY F.;DAVIS CLAUDE L.;HRDINA KENNETH E.;ROBINSON MICHAEL MR.;WASILEWSKI MICHAEL H.;WIGHT JOHN F. |
分类号 |
G21K1/06;C03B8/04;C03B19/01;C03B20/00;C03B32/00;C03C3/06;C03C4/00;H01L21/027;(IPC1-7):C03B19/00 |
主分类号 |
G21K1/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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