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发明名称
Verfahren zum Füllen von Gräben
摘要
申请公布号
DE10290240(T5)
申请公布日期
2003.12.11
申请号
DED10290240T
申请日期
2002.01.21
申请人
TRIKON HOLDINGS LTD., NEWPORT
发明人
MACKNEIL, JOHN;BEEKMAN, KNUT;WILBY, TONY
分类号
H01L21/76;H01L21/316;H01L21/762;(IPC1-7):H01L21/762
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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