PROBING SYSTEM HAVING FOREIGN SUBSTANCE PREVENTING APPARATUS

摘要

PURPOSE: A probing system having a foreign substance preventing apparatus is provided to be capable of minimizing test error and the damage of a probe card. CONSTITUTION: A probing system is provided with a probe card(120) having at least one test probe for carrying out a test at a semiconductor chip installed at the upper portion of a wafer and a foreign substance preventing part for preventing foreign substance from being flowed into the probe card. The probing system further includes a fixing plate(110) for stably fixing the probe card and the foreign substance preventing part, and a wafer chuck(150) installed at the lower portion of the fixing plate for fixing the wafer and contacting the semiconductor chip with the test probe. Preferably, the foreign substance preventing part includes an air jet pipe(132) having a plurality of jet holes(134) and a connecting pipe.