发明名称 A METHOD FOR MAKING A SEMICONDUCTOR DEVICE HAVING A HIGH-K GATE DIELECTRIC
摘要 <p>A method for making a semiconductor device is described. That method comprises forming on a substrate (100) a dielectric layer (101) that has a dielectric constant that is greater than the dielectric constant of silicon dioxide. An insulating layer (102), which is compatible with the dielectric layer and a gate electrode to be formed on the insulating layer, is formed on the dielectric layer, and a gate electrode (103) is then formed on the insulating layer.</p>
申请公布号 WO2003103032(P1) 申请公布日期 2003.12.11
申请号 US2003016307 申请日期 2003.05.22
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