SEMICONDUCTOR MEMORY DEVICE AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A semiconductor memory device and a method for manufacturing the same are provided to prevent bridge of a storage node while collapsing the storage node by forming a cap on the storage node. CONSTITUTION: A plurality of storage nodes(26a) having cylindrical shape are formed on a semiconductor substrate(20). A cap(28a) is formed on the storage nodes by surrounding the storage nodes(26a). Adjacent caps(28a) are isolated each other or connected each other to one direction. Preferably, the cap(28a) is made of a nitride layer.