发明名称 |
Non-invasive wafer transfer position diagnosis and calibration |
摘要 |
An apparatus and method for detecting mispositioned wafers attributable to transfer shift of the wafer are disclosed. A calibration wafer has a target region comprising a pattern of optically distinguishable features from which is determined the position of the calibration wafer within the chamber subsequent to its transfer therein. Preferably, the features comprise a pattern of colors that can be detected by spectroscopy. A preferred form and manner of providing such color features is by way of dielectric thin film filters.
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申请公布号 |
US2003227624(A1) |
申请公布日期 |
2003.12.11 |
申请号 |
US20020165006 |
申请日期 |
2002.06.07 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. |
发明人 |
WU YU-YI;CHEN KUN-EI;LIN SAN-CHING |
分类号 |
G03F7/20;H01L21/00;H01L21/68;(IPC1-7):G01B11/00 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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