| 发明名称 |
Piezoelektrische Dünnschichtanordnung |
| 摘要 |
A piezoelectric thin-film device, a process for its manufacturing, and an ink-jet recording head comprising said thin-film device are provided, wherein the PZT seed crystals are produced by either physical vapor deposition, chemical vapor disposition, or spin-coating. <IMAGE> |
| 申请公布号 |
DE69725910(D1) |
申请公布日期 |
2003.12.11 |
| 申请号 |
DE1997625910 |
申请日期 |
1997.03.05 |
| 申请人 |
SEIKO EPSON CORP., TOKIO/TOKYO |
发明人 |
NISHIWAKI, TSUTOMU;SUMI, KOUJI;MURAI, MASAMI;SHIMADA, MASATO |
| 分类号 |
B41J2/045;B41J2/015;B41J2/055;B41J2/135;B41J2/14;B41J2/145;B41J2/16;H01L41/09;H01L41/22 |
主分类号 |
B41J2/045 |
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